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hot filament chemical vapor deposition
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hot filament chemical vapor deposition
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工学
化学气相沉积
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hot filament chemical vapor deposition
热丝化学气相沉积
采用高温热丝分解前驱气体,通过调节前驱体组分对比和热丝温度而获得大面积的高质量沉积膜的方法。
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