“high temperature high energy ion implantation”的概念、定义、翻译、参考文献-科学参考

单词	high temperature high energy ion implantation
释义	high temperature high energy ion implantation Encyclopedia 工学离子注入掺杂工艺释 high temperature high energy ion implantation高温高能离子注入在离子注入时，对衬底进行加热使之温度升高的过程。
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