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high temperature high energy ion implantation
释义
high temperature high energy ion implantation
Encyclopedia
工学
离子注入掺杂工艺
释
high temperature high energy ion implantation
高温高能离子注入
在离子注入时,对衬底进行加热使之温度升高的过程。
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更新时间:2024/12/26 1:09:04