“high-density plasma etching”的概念、定义、翻译、参考文献-科学参考

单词	high-density plasma etching
释义	high-density plasma etching Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
随便看	undergoing professional training at an old-type opera school undergraduate education undergraduate education of pratacultural science Undergraduate Specialty Catalogue of Higher Education Institution Underground underground anchor rig underground antiseepage method Underground Architecture underground banks underground blasting underground breaking vehicle underground car loading equipment underground cavern excavation underground city in Northern America underground coal gasification underground cold storage facility underground communication underground complex underground concrete-gunite truck underground concrete-mixer truck underground cultural and educational facilities underground deep stormwater storage tunnel underground diaphragm wall underground diaphragm wall foundation underground drilling

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