“high-density plasma etching”的概念、定义、翻译、参考文献-科学参考

单词	high-density plasma etching
释义	high-density plasma etching Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
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