“high-density plasma etching”的概念、定义、翻译、参考文献-科学参考

单词	high-density plasma etching
释义	high-density plasma etching Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
随便看	reignition reignition of arc Rei Kawakubo reimaging reimbursable usage system on water resources Reims Reims Cathedral rein re-indexing reindustrialization Reiner Reines, Frederick reinflate reinforce reinforced reinforced concrete reinforced concrete beam reinforced concrete bridge reinforced concrete column reinforced concrete slab reinforced concrete structure reinforced concrete support（sustainer） reinforced concrete truss reinforced concrete wall reinforced connoisseur concrete composite floor slab

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