“high-density plasma etching”的概念、定义、翻译、参考文献-科学参考

单词	high-density plasma etching
释义	high-density plasma etching Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
随便看	electric heating oil gathering process electric heating radiator electric hoist electric hydraulic control system electric hysteresis effect electric hysteresis loop electric ignition technology electric image electric image method electric incubator electric induction electric initiation electric instruments components electric instruments system electric instruments verifying apparatus electric insulation textiles electricity electricity consumption for irrigation and drainage electricity consumption load curve electricity consumption load ratio electricity consumption of primary industry electricity consumption of rural residents living electricity consumption power factor electricity consumption structure electricity consumption to transferred cooling (heat) quantity ratio

科学参考收录了854744条科技类词条，基本涵盖了常见科技类参考文献及英语词汇的翻译，是科学学习和研究的有利工具。