“high-density plasma etching”的概念、定义、翻译、参考文献-科学参考

单词	high-density plasma etching
释义	high-density plasma etching Encyclopedia 工学刻蚀工艺释 high-density plasma etching高密度等离子体刻蚀在集成电路制造中，利用高频辉光放电反应原理产生等离子体的干法刻蚀技术。
随便看	polymer crystallite polymer damping material polymer degradative imaging materials polymer dielectric materials polymer dots polymer drilling fluid polymer drying polymer dynamics polymer electret polymer electrets polymer electrochromic materials polymer electroluminescence materials polymer electrolyte fuel cell polymer electrolyte fuel cell (PEFC) polymer electrolyte membrane polymer electrolyte membrane fuel cell polymer energy materials polymer entanglement polymer extrusion process polymer fatliquors polymer field-effect transistor polymer film polymer flooding polymer flooding model polymer for astronautic

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