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heat evaporation
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heat evaporation
Encyclopedia
工学
半导体薄膜制备
释
heat evaporation
热蒸发
在真空室内采用加热的方式蒸发放置在坩埚中的固体材料(镀料),蒸发出来的原子或分子可以自由地扩散到真空室的室壁或在镀件表面形成薄膜的技术。
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