“glancing incidence”的概念、定义、翻译、参考文献-科学参考

单词	glancing incidence
释义	glancing incidence Encyclopedia 工学光刻机测量系统释 glancing incidence掠入射调焦调平测量以三角测量原理为基础的垂向测量方法，其通常采用双远心成像系统，并以较大的入射角在被测物表面成像。 Physics 光学、声学光学 glancing incidence, grazing incidence掠入射 glancing incidence掠入射^†，小角度入射
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