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frequency-modulation laser interferometry
释义
frequency-modulation laser interferometry
Encyclopedia
工学
调频激光干涉测量
释
frequency-modulation laser interferometry
调频激光干涉测量
调频干涉测量是以输出激光光频随时间呈线性变化的激光器作为光源,对激光的输出频率进行调制,以Michelson干涉光路作为测量光路,测量激光经过参考臂和测量臂之间的相对延迟的激光干涉测量系统。
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