“all solid state frequency conversion generator”的概念、定义、翻译、参考文献-科学参考

单词	all solid state frequency conversion generator
释义	all solid state frequency conversion generator Encyclopedia 理学火花放电光源释 all solid state frequency conversion generator全固态射频发生器提供电感耦合等离子体炬（ICP）放电的能源，能量以射频的形式由炬管同心的感应线圈耦合给等离子体。又称高频发生器。
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