“extreme ultraviolet lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	extreme ultraviolet lithography technology
释义	extreme ultraviolet lithography technology Encyclopedia 工学光刻技术释 extreme ultraviolet lithography technology极紫外光刻技术集成电路制造中，以波长为13.5纳米的极紫外光作为曝光光源的光刻技术。
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