“extreme ultraviolet lithography technology”的概念、定义、翻译、参考文献-科学参考

单词	extreme ultraviolet lithography technology
释义	extreme ultraviolet lithography technology Encyclopedia 工学光刻技术释 extreme ultraviolet lithography technology极紫外光刻技术集成电路制造中，以波长为13.5纳米的极紫外光作为曝光光源的光刻技术。
随便看	optical integration optical interference thin films optical interferometer optical interferometry Optical Interferometry Exchange Format Optical Inter-orbit Communications Engineering Test Satellite optical invariant optical isolator optical isomer optical isomerism optical jukebox optical Kerr effect optical label switching，OLS optical laser radar optical lattice optical length optical level optical lever optical levitation optical libration optical libration of the Moon optical light optical limiting optical limiting polymer optical line shape function

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