“evaporation coating equipment”的概念、定义、翻译、参考文献-科学参考

单词	evaporation coating equipment
释义	evaporation coating equipment Encyclopedia 工学物理气相沉积技术释 evaporation coating equipment蒸发镀膜装置在真空室中通过加热将镀料熔融、汽化，使其原子或分子沉积到基片（工件）表面从而形成薄膜的镀膜装置。
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