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electron beam microfabrication of vacuum electronic device
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electron beam microfabrication of vacuum electronic device
Encyclopedia
工学
真空电子器件电子束加工
释
electron beam microfabrication of vacuum electronic device
真空电子器件电子束加工
通过具有一定能量的电子束与固体表面相互作用来改变固体表面物理、化学性质和几何结构的精密加工技术。
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