“electron beam microfabrication of vacuum electronic device”的概念、定义、翻译、参考文献-科学参考

单词	electron beam microfabrication of vacuum electronic device
释义	electron beam microfabrication of vacuum electronic device Encyclopedia 工学真空电子器件电子束加工释 electron beam microfabrication of vacuum electronic device真空电子器件电子束加工通过具有一定能量的电子束与固体表面相互作用来改变固体表面物理、化学性质和几何结构的精密加工技术。
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