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doping-based etch-stop technology
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doping-based etch-stop technology
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工学
[传感器制造]
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doping-based etch-stop technology
基于掺杂的自停止技术
硅基传感器在腐蚀工艺过程中,当腐蚀液腐蚀到硅中掺杂的其他元素(如硼、磷)、腐蚀到氮化层或氧化层、腐蚀到硅单晶晶向之间的各向异性层时,腐蚀速率出现明显停滞,导致腐蚀自动终止的一种工艺技术。
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